Grantee Research Project Results
Institution Information | |
---|---|
Name: | MKS Instruments Inc. |
Dept: | |
EPA Region: | 1 |
Street Address: | 2 Tech Drive, Suite 201 |
City: | Andover |
State: | MA |
Zip Code: | 01810 |
Associated Project Details for: MKS Instruments Inc.
Grant Number | Grant Title | Project Type | Project Period |
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68D01037 | Exhaust Gas Monitoring for Process Control and Pollution Reduction in Semiconductor Manufacturing | SBIR | April 1, 2001 through September 1, 2001 |
The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.